Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor.

Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage

High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relativ...

Ultra-fine Tracking Control on Piezoelectric Actuated Motion Stage Using Piezoelectric Hysteretic Model

The tracking control accuracy of the piezoelectric actuator (PEA) is limited due to its inherent hysteresis nonlinearity. A new piezoelectric-actuator model is synthesized based on two first-order transfer systems in parallel with two tuned parameters determined from one experiment. Two open-loop tracking controllers are implemented with the proposed model to compensate the hysteresis of linear...

Vibration and Tracking Control of a Flexure-Guided Nanopositioner Using a Piezoelectric Strain Sensor

This paper presents a novel sensing technique which uses a piezoelectric strain sensor for damping and accurate tracking of a nanopositioning stage. Piezoelectric elements have been used effectively as sensors for vibration control of smart structures. However, complications arise when one uses a piezoelectric strain sensor in a feedback loop for tracking. This is due to the high-pass character...

Position control of a MEMS stage with integrated sensor

Range-based control of dual-stage nanopositioning systems.

A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation. The proposed control approach addresses the issue that some precision positioning trajectories are not achievab...